主权项 |
1. A diaphragm for deployment in a micro electro mechanical system (MEMS) microphone, the diaphragm comprising:
a base portion, the base portion being generally planar and having a first side and a second side; one or more protrusions that are formed with and extend from the base portion, the protrusions being configured and arranged so as to stiffen the base portion and increase a range of sound pressure levels before distortion occurs. |