| 发明名称 |
SEMICONDUCTOR PHOTOMULTIPLIER AND A PROCESS OF MANUFACTURING A PHOTOMULTIPLIER MICROCELL |
| 摘要 |
The present disclosure relates to a process of manufacturing a photomultiplier microcell. The process comprises providing an insulating layer over an active region; and implanting a dopant through the insulating layer to form a photosensitive diode in the active region. The insulating layer once formed is retained over the active region throughout the manufacturing process. |
| 申请公布号 |
US2016005913(A1) |
申请公布日期 |
2016.01.07 |
| 申请号 |
US201414321487 |
申请日期 |
2014.07.01 |
| 申请人 |
SensL Technologies Ltd. |
发明人 |
O'Neill Kevin;Wall Liam;Jackson John Carlton |
| 分类号 |
H01L31/18;H01L31/115;H01L31/107;H01L31/0232 |
主分类号 |
H01L31/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A process of manufacturing a photomultiplier microcell; the process comprising;
providing an insulating layer over an active region; and implanting a dopant through the insulating layer to form a photosensitive diode in the active region; wherein the insulating layer once formed is retained over the active region throughout the manufacturing process. |
| 地址 |
Cork IE |
