| 主权项 |
1. A carrier for supporting a substrate in a substrate processing chamber, comprising:
a substrate fixation assembly, wherein the substrate fixation assembly comprises one or more fixation units, wherein each fixation unit comprises:
an edge contacting surface configured for contacting the edge of the substrate and defining a contact position;a first fixation element having a first surface configured for contacting a first substrate surface of the substrate, wherein the first fixation element extends from the contact position by a first length substantially parallel to the first substrate surface;a second fixation element having a second surface configured for contacting a second substrate surface of the substrate, wherein the second substrate surface opposes the first substrate surface of the substrate, and wherein the second fixation element extends from the contact position by a second length substantially parallel to the second substrate surface; anda force element for providing a fixation force for the substrate with at least one of the first and the second fixation element;wherein the shorter length of the first length and the second length provides in combination with the fixation force a momentum; andwherein the one or more fixation units provide the momentum to be 10 Nmm per substrate edge length unit or above. |
