| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ablation method for a passivation film-laminated substrate, capable of preventing diffusion of energy and reflection of a laser beam. <P>SOLUTION: The ablation method for a passivation film-laminated substrate comprises applying a laser beam to the substrate on which the passivation film formed of oxides is laminated to perform ablation. The method includes: a protective film-forming step of applying a liquid resin containing the fine powder of oxides having absorptivity to the wavelength of the laser beam to at least a subject area of the substrate to be ablated, to form a protective film containing the fine powder; and a laser processing step of applying the laser beam to the area of the substrate on which the protective film is formed, thereby performing ablation after performing the protective film-forming step. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
