| 摘要 |
<p>The invention provides an evaporation device. Evaporation is performed under minimum limit temperature of a crucible necessary for a specified evaporation rate, when evaporation material (24) in the crucible (22) reduces and the evaporation amount (formation of evaporation particles supplied from the crucible (22)) of the evaporation material (24) from the crucible reduces and thereby leading to reduction of the evaporation rate, and to maintain the specified evaporation rate and in the circumstance that the aperture of a flow control valve (19) is largened sharply, a target heating temperature of the crucible rises with an incremental quantity. The result is that the evaporation amount of the evaporation material (24) form the crucible (22) increases, and the specified evaporation rate is maintained. By enabling the target temperature to rise with an incremental quantity successively, not only thermal degradation of the evaporation material (24) can be prevented and the evaporation material (24) can be used to the end, but can also reduce residues of the evaporation material (24) to a minimum value.</p> |
