发明名称 ウエハ加工用テープ及びその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent an adhesive layer from being peeled from a cohesive layer of an adhesive tape. <P>SOLUTION: There is provided a wafer processing tape 1 in which a peeling film 2, an adhesive layer 3, a cohesive layer 41, and a base material film 42 are laminated in this order, and an adhesive tape 4 including the base material film and the cohesive layer covers the adhesive layer and being in contact with the peeling film around the adhesive layer. A marking M is formed so as to straddle a boundary line R between the adhesive layer and the cohesive layer from the base material film side on the adhesive layer, and the adhesive layer and the cohesive layer are fused or welded by the marking. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5839931(B2) 申请公布日期 2016.01.06
申请号 JP20110230231 申请日期 2011.10.20
申请人 古河電気工業株式会社 发明人 井之前 千佳子;佐野 透
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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