发明名称 電子的デバイス
摘要 The invention relates to a hydrophobically coated molecular sieve which comprises particles having a particle size of 1000 nm or less, the surface of the particles being coated with a silane of the general formula SiR1R2R3R4, and also to a method of producing it and to a method of using it. In addition, the invention relates to use of the coated molecular sieve and also to compositions comprising the molecular sieve and to use in producing apparatus such as, for example, electronic components and devices.
申请公布号 JP5840637(B2) 申请公布日期 2016.01.06
申请号 JP20130057643 申请日期 2013.03.21
申请人 ナノスケペ アーゲーNANOSCAPE AG;サエズ ゲッターズ エス.ピー.エイ.SAES GETTERS S.P.A. 发明人 ザウアー,ユルゲン;コール,アー
分类号 H01L23/10;C01B39/14;C08K9/06;C08L101/12 主分类号 H01L23/10
代理机构 代理人
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