ETCHING SOLUTION COMPOSITION FOR METAL LAYER AND MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY USING THE SAME

摘要

The present invention provides an etching solution composition wherein the etching speed of the time when the 5000 sheets are processed relative to the etching speed of the time when the 100 sheets are processed is 0.9 to 1 and a method for manufacturing an array substrate for a liquid crystal display device using the composition. The etching solution composition comprises: a metal film oxidizing agent; a compound containing fluorine; phosphoric acid; glycols; and the remaining water.