发明名称 キャパシタ
摘要 <p>A capacitor that has an electrode of an n-type semiconductor that is provided in contact with one surface of a dielectric, has a work function of 5.0 eV or higher, preferably 5.5 eV or higher, and includes nitrogen and at least one of indium, tin, and zinc. Since the electrode has a high work function, the dielectric can have a high potential barrier, and thus even when the dielectric is as thin as 10 nm or less, a sufficient insulating property can be maintained. In particular, a striking effect can be obtained when the dielectric is formed of a high-k material.</p>
申请公布号 JP5839566(B2) 申请公布日期 2016.01.06
申请号 JP20120019405 申请日期 2012.02.01
申请人 株式会社半導体エネルギー研究所 发明人 竹村 保彦
分类号 H01L21/8242;H01L21/336;H01L21/822;H01L21/8247;H01L27/04;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8242
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