发明名称 |
METHOD FOR DETECTING FAULT IN LEAKAGE INSPECTOR, LEAKAGE INSPECTOR |
摘要 |
<p>In a calibration step, air is sealed in a first device serving as a reference device; a pressure change B 1 in the first device at a point elapsed a predetermined period of time from the air sealing, and a pressure change B2 at a point further elapsed the predetermined period of time are measured; and these pressure changes are stored. In an inspection step, air is sealed in a second device to be checked for a leak; pressure changes B1' and B2' corresponding to the pressure changes B1 and B2 are measured after the air sealing; and a waveform ratio K is calculated from these measured values as (B 1' - B2')/(B 1 - B2). It is decided whether a malfunction occurs in a leakage inspector by using the value of the waveform ratio K.</p> |
申请公布号 |
EP2246683(B1) |
申请公布日期 |
2016.01.06 |
申请号 |
EP20100174720 |
申请日期 |
2007.01.12 |
申请人 |
COSMO INSTRUMENTS CO., LTD. |
发明人 |
FURUSE, AKIO |
分类号 |
G01M3/32;G01M3/00;G01M99/00 |
主分类号 |
G01M3/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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