发明名称 Drive for an XY-Table and XY-Table
摘要 A drive for an XY-table is disclosed, having a stationary, ferromagnetic and U-shaped yoke (1) including a first limb (1.1) and a second limb (1.2) which lie together in one plane (XY), and having a movable ferromagnetic bar (2), the yoke (1) and the bar (2) carrying a magnetic circuit with a flux (¦) that takes a path across air gaps between the limbs (1.1, 1.2) and the bar (2), and brings about vertical reluctance forces there which counteract the gravitational force of the bar (2). Bar (2) lies parallel to and below the plane (XY) defined by the limbs (1.1, 1.2). An XY-table with such a drive is disclosed. A separate drive to reverse the direction of movement (X) of the table (6) is also disclosed.
申请公布号 EP2963497(A1) 申请公布日期 2016.01.06
申请号 EP20140174983 申请日期 2014.06.30
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 KLAVER, RENÉ;COMPTER, JOHN
分类号 G03F7/20 主分类号 G03F7/20
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