发明名称 |
Microelectromechanical and/or nanoelectromechanical structure with ajustable quality factor |
摘要 |
<p>Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.</p> |
申请公布号 |
EP2796884(B1) |
申请公布日期 |
2016.01.06 |
申请号 |
EP20140165742 |
申请日期 |
2014.04.24 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
DEIMERLY, YANNICK;JOURDAN, GUILLAUME;REY, PATRICE |
分类号 |
G01P15/08 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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