发明名称 |
MINIATURE SENSOR STRUCTURES FOR ION MOBILITY SPECTROMETERS |
摘要 |
For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as aluminum nitride. In various embodiments, the sensor structure may be formed using discrete individual ceramic sheets and/or from a preformed ceramic tube. Via holes are formed into the sensor structure to provide for efficient circuitry configurations of the IMS drift tube and/or providing electrical connections between the interior and exterior of the drift tube. |
申请公布号 |
EP2962093(A1) |
申请公布日期 |
2016.01.06 |
申请号 |
EP20140756986 |
申请日期 |
2014.02.26 |
申请人 |
IMPLANT SCIENCES CORPORATION |
发明人 |
ANDERSON, ANDREW G.;VELAZQUEZ, TROY A.;IVASHIN, DMITRIY V.;BOUMSELLEK, SAID |
分类号 |
G01N27/333 |
主分类号 |
G01N27/333 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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