Surface acoustic wave apparatus and manufacturing method therefor

摘要

A manufacturing method for a SAW apparatus is disclosed. A first insulating layer (2) is formed on the entire surface of a piezoelectric LiTaO3 substrate (1). By using a resist pattern (3) used for forming an IDT electrode, the first insulating layer (2) in which the IDT electrode is to be formed is removed. An electrode film (4) made of a metal having a density higher than Al, or of an alloy primarily including such a metal, is disposed in the area in which the first insulating layer is removed so as to form the IDT electrode. The resist pattern (3) remaining on the first insulating layer (2) is removed. A second insulating layer (6) is formed to cover the first insulating layer (20) and the IDT electrode.