| 发明名称 | Vertical cavity surface emitting laser and atomic oscillator | ||
| 摘要 | A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate. | ||
| 申请公布号 | US9231377(B2) | 申请公布日期 | 2016.01.05 |
| 申请号 | US201414575071 | 申请日期 | 2014.12.18 |
| 申请人 | Seiko Epson Corporation | 发明人 | Imai Yasutaka |
| 分类号 | H01S5/00;H01S5/42 | 主分类号 | H01S5/00 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A vertical cavity surface emitting laser comprising: a substrate; a laminated body which is provided over the substrate, the laminated body including a first mirror layer which is provided over the substrate, an active layer which is provided over the first mirror layer, and a second mirror layer which is provided over the active layer; an insulation layer provided on the first mirror layer and surrounding the laminated body, wherein, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate. | ||
| 地址 | JP | ||