The present invention provides a thin film capacitor. The thin film capacitor includes a substrate having an upper surface where a trench is formed; and a capacity part where a lower electrode layer, a dielectric layer and an upper electrode layer are successively formed on the upper surface of the substrate. The trench is formed along the edge of a specific plane figure.
申请公布号
KR20160000613(A)
申请公布日期
2016.01.05
申请号
KR20140077869
申请日期
2014.06.25
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
LIM, JONG BONG;LEE, HAI JOON;KIM, DOO YOUNG;KIM, CHANG HOON