Flow regulating device

摘要

A flow regulating device 1 is provided which includes: a valve element 19 which is movable into contact with or away from a valve seat 18; a spring 21 for exerting an urging force on the valve element 19; a diaphragm 20 fixed to an end of the valve element 19, the diaphragm having a fluid contact surface 20a and a back surface 20b; a pressure chamber 24 into which compressed air is externally introduced; and a piston 25 for transmitting the pressure of the compressed air that is introduced into the pressure chamber 24 to the back surface 20b of the diaphragm 20, wherein a portion of the piston 25 which portion receives the pressure of the compressed air has an area equal to or more than twice the area of the fluid contact surface 20a of the diaphragm 20.

主权项

1. A flow regulating device comprising:
a housing part including a flow channel formed in the housing part, and an inlet port and an outlet port provided at respective ends of the flow channel; a valve element part which is movable to get into contact with or away from a valve seat part provided in the flow channel so as to place the flow channel in a closed state or an open state; a spring part for exerting an urging force on the valve element part in a direction to bring the valve element part into contact with the valve seat part; a diaphragm fixed to an end of the valve element part, the diaphragm having a first surface which contacts with a fluid flowing in the flow channel, and a second surface which does not contact with the fluid; a pressure chamber into which an operating gas is externally introduced; a piston part for transmitting pressure of the operating gas that is introduced into the pressure chamber to the second surface of the diaphragm; and a membrane member disposed between the pressure chamber and a first surface of the piston part for isolating the pressure chamber from the piston part and for covering the entirety of the first surface of the piston part, the first surface of the piston part receiving the pressure of the operating gas introduced into the pressure chamber through the membrane member, wherein the piston part includes a communication hole extending from the first surface of the piston part which surface contacts with the membrane member to a second surface of the piston part which surface contacts with the diaphragm, the communication hole being isolated from the pressure chamber by the membrane member, and wherein a portion of the piston part which portion receives the pressure of the operating gas has an area equal to or more than twice an area of the first surface of the diaphragm.