3-D PATTERNING METHOD USING LASER

摘要

The present invention is to form a pattern which is composed of a three dimensional structure on an object to be processed by using a laser. A method for performing three dimensional patterning on an object to be processed by using a laser comprises: a first step of setting a unit processing area on an object to be processed; a second step of processing a three dimensional structure included in the unit processing area until a laser beam moves along a first scan path from one boundary of the unit processing area and arrives the other boundary of the unit processing area; a third step of converting the direction of the laser beam to the next step and moving the laser beam to a second scan path as much as a step pitch; and a fourth step of repeatedly performing the second and third steps and processing the entire unit processing area if the movement of the laser beam along an n^th scan path is completed. Accordingly, the object to be processed is protected by preventing thermal energy from being accumulated in the object to be processed, and the formation of a three dimensional fine structure is possible.