Rotary table device

摘要

The inside of a case of a rotary table device is divided into a first space and a second space. The pressure of the first space is regulated to a pressure higher than the pressure of the second space during a steady state. The relationship between the pressures is reversed at a certain timing, to make the pressure of the second space higher than the pressure of the first space. Such operation can forcibly close a check valve disposed between the first space and the second space on regular basis, thereby preventing a malfunction of the check valve.

主权项

1. A rotary table device, comprising:
a case; a motor stored in the case; a table fixed to one end of an output shaft of the motor; a discharge port discharging air from the inside of the case to the outside; and a pressure regulating unit, wherein the case has: first and second spaces partitioned with a partitioning member; a first air supply path supplying air to the first space; a second air supply path supplying air to the second space; and a check valve provided in the partitioning member, and wherein the discharge port discharges the air from the second space to the outside of the case, and the pressure regulating unit constantly regulates a pressure of the first space and a pressure of the second space to a pressure higher than an outside pressure, and regulates the pressure of the first space to a pressure higher than the pressure of the second space during a steady state, but regulates the pressure of the second space to a pressure higher than the pressure of the first space at a certain timing.