Semiconductor wafer weight metrology apparatus

摘要

A semiconductor wafer metrology technique comprising performing atmospheric buoyancy compensated weighing of a wafer, in which the wafer is weighed in a substantially upright condition. A vertical or near vertical wafer orientation causes the surface area in the direction of a force (weight) sensor to be reduced compared with a horizontal wafer orientation. Hence, the electrostatic force components acting in the same direction as the wafer weight force component is reduced.

主权项

1. Apparatus for measuring the mass of a semiconductor wafer, the apparatus having:
a weighing instrument for measuring the weight of the wafer; a chamber for containing the wafer during measurement, said chamber having a sufficient shape to accommodate the wafer while reducing air current effects on the wafer when weighing the wafer; monitoring means arranged to determine the buoyancy exerted on the wafer by the atmosphere in the chamber; and a wafer holder arranged to support the plane of the wafer in a substantially upright orientation when the wafer's weight is measured.