Multizone control of lamps in a conical lamphead using pyrometers

摘要

A substrate processing apparatus is provided. The substrate processing apparatus includes a vacuum chamber having a dome and a floor. A substrate support is disposed inside the vacuum chamber. A plurality of thermal lamps are arranged in a lamphead and positioned proximate the floor of the vacuum chamber. A reflector is disposed proximate the dome, where the reflector and the dome together define a thermal control space. The substrate processing apparatus further includes a plurality of power supplies coupled to the thermal lamps and a controller for adjusting the power supplies to control a temperature in the vacuum chamber.

主权项

1. A substrate processing apparatus, comprising:
a vacuum chamber comprising a dome and a floor; a substrate support disposed inside the vacuum chamber; a plurality of thermal lamps arranged in a lamphead and positioned proximate the floor of the vacuum chamber; a reflector disposed proximate the dome, the reflector and the dome together defining a thermal control space; a plurality of power supplies coupled to the plurality of thermal lamps; and a controller for adjusting the power supplies to control a temperature in the vacuum chamber.