Precision feeding device and precision transfer equipment

摘要

A precision feeding device that drives a table supported by a base in a predetermined moving direction includes: a rod connected to the table; a drive mechanism that drives to move the rod forward and backward in the moving direction; and a laser interferometer that detects a displacement of the rod relative to the base. The drive mechanism includes a linear motor that symmetrically applies a drive force on the rod relative to an axis in the moving direction. A laser path of the laser interferometer passes through the rod and extends in the moving direction, so that a moving axis of the rod, a thrust axis of the drive mechanism and a detection axis of the laser interferometer are aligned.

主权项

1. A precision feeding device that drives a movable body in a predetermined moving direction, the movable body being supported by a base and movable in the moving direction, the precision feeding device comprising:
a hollow tubular driving body that is connected to the movable body and that extends in the moving direction; a drive mechanism that drives to move the driving body forward and backward in the moving direction; and a displacement detector that detects a displacement of the movable body relative to the base, wherein the drive mechanism comprises a linear motor that symmetrically applies a drive force on the driving body relative to an axis of the driving body in the moving direction, the linear motor comprising a movable member provided on the driving body and having a thrust axis aligned with a movement axis of the driving body, and a stator provided in a form of a tube around the driving body, and the displacement detector is a laser interferometer that has a laser path penetrating an interior of the driving body and extending in the moving direction to be aligned with the movement axis of the driving body and the thrust axis of the linear motor.