High speed differential wiring in glass ceramic MCMS

摘要

The embodiments of the present invention relate generally to the fabrication of integrated circuits, and more particularly to a structure and method for fabricating differential wiring patterns in multilayer glass-ceramic (MLC) modules. A structure and method of forming a MLC having layers with staggered, or offset, pairs of lines formed directly on one another are disclosed. In addition, a structure and method of forming a MLC having layers with staggered, or offset, pairs of lines that periodically reverse polarity are disclosed.

主权项

1. A structure comprising:
a first glass-ceramic layer; a first pair of lines on the first glass-ceramic layer, the first pair of lines comprising a first layer left line and a first layer right line separated by an intervening portion of the first glass-ceramic layer; a second glass-ceramic layer on the first glass-ceramic layer; a second pair of lines on the second glass-ceramic layer, the second pair of lines comprising a second layer left line and a second layer right line separated by an intervening portion of the second glass-ceramic layer, wherein the second layer left line is vertically aligned with the first layer right line; a third glass-ceramic layer on the second glass-ceramic layer; and a third pair of lines on the third glass-ceramic layer, the third pair of lines comprising a third layer left line and a third layer right line separated by an intervening portion of the third glass-ceramic layer, wherein the third layer left line is vertically aligned with the first layer left line and the third layer right line is vertically aligned with the second layer left line, wherein the third layer left line is connected to the first layer right line, wherein the third layer right line is connected to the first layer left line, and wherein the second layer left line and the second layer right line are not connected to any of the first layer left line, the first layer right line, the third layer left line, or the third layer right line.