Device for setting image acquisition conditions, and computer program

摘要

The present invention relates to a device (303) for setting image acquisition conditions for charged particle beam devices or the like. An image integration unit (402) forms a plurality of images with a number of different integrations (number of integrations 2, 4 . . . N) from one image (number of integrations N) acquired in advance. A pattern matching unit (403) matches the patterns of each of the plurality of images having a number of different integrations with template images registered in advance and then finds a score that shows the degree of matching between images. A selection unit (407) selects a number of integrations such that any variation in the scores is contained within a prescribed allowable range. The selected number of integrations is stored in a recipe of the device. Thus, it is possible to determine the number of integrations in the recipes without having to operate the device, and to set image acquisition conditions so as to allow a minimization of the processing time while maintaining a sufficient S/N ratio.

主权项

1. A device for setting image acquisition conditions comprising:
an image integrator that integrates a plurality of image signals and forms an image; and a pattern matcher that performs pattern matching on the image integrated by the image integration unit using a preliminarily registered template, wherein: the image integrator changes the number of integrations on each of a plurality of preliminarily acquired integrated images, and forms a plurality of images with the different numbers of integrations, the pattern matcher performs pattern matching between the plurality of images with the different numbers of integrations and the preliminarily registered template, and acquires a score representing a degree of matching between the template and a position specified by the template, the device further comprises a selector that selects
the number of integrations where a variation in the scores is within a prescribed allowable range,the number of integrations where all the plurality of integrated images represent a score of at least a prescribed value,the number of integrations where a variation in dimensions of a pattern specified by the pattern matching is within a prescribed allowable range, orthe number of integrations where an average of dimensions of the pattern is within a prescribed range, the number of integrations is the number of integrations of images obtained by a charged particle beam device, and the preliminary registered template is different from the images obtained by the charged particle beam device and integrated by the image integrator.