COATING METHOD AND APPARATUS OF FLUORINE-DOPPED TIN OXIDE TRANSPARENT CONDUCTIVE

摘要

The present invention relates to an apparatus and a method for coating a fluorine-doped tin oxide transparent conductive film and, more specifically, relates to an apparatus and a method for coating a fluorine-doped tin oxide transparent conductive film, which can uniformly deposit a thin film on a substrate at atmospheric pressure and prevent a coating liquid from being solidified as the coating liquid need not to be stored for a long time. According to the present invention, the apparatus for coating a fluorine-doped tin oxide transparent conductive film comprises: a guide pipe; a first solution storage unit storing a first solution; a second solution storage unit storing a second solution; a spray nozzle means spraying a coating liquid made by mixing the first solution and the second solution from an upper portion to a lower portion inside the guide pipe; a hot air machine blowing a fine particle sprayed in the spray nozzle means in a horizontal direction of the guide pipe; a heating plate heating the substrate at 200 to 300°C; and a motor rotating the substrate.