| 发明名称 | Solid state light source assisted processing | ||
| 摘要 | Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a lamphead including a set of lamps, wherein the first set of lamps are not solid state light sources, and a set of solid state light sources disposed on the lamp head, to provide pulsed or continuous energy to the process chamber. | ||
| 申请公布号 | US9232569(B2) | 申请公布日期 | 2016.01.05 |
| 申请号 | US201313779004 | 申请日期 | 2013.02.27 |
| 申请人 | APPLIED MATERIALS, INC. | 发明人 | Johnson Joseph;Gerling John;Schuegraf Klaus |
| 分类号 | A21B1/00;H05B3/00;H01L21/67 | 主分类号 | A21B1/00 |
| 代理机构 | Moser Taboada | 代理人 | Moser Taboada ;Taboada Alan |
| 主权项 | 1. An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising: a lamp head including a set of lamps, wherein the set of lamps are not solid state light sources; and a set of solid state light sources disposed on the lamp head to provide pulsed or continuous energy to the process chamber, wherein the set of solid state light sources includes a plurality of solid state light sources disposed on one or more printed circuit boards coupled to the lamp head. | ||
| 地址 | Santa Clara CA US | ||