发明名称 DEVICE FOR REMOVING BUBBLE IN CHEMICAL TANK
摘要 The present invention relates to a device for removing bubbles from a chemical tank. The device comprises: an inclination inflow unit which allows chemicals to flow into a tank body; a trap unit which is connected to a hole provided on the bottom surface of the inclination inflow unit, supplies the chemicals to the tank body, collects bubbles included in the chemicals, and separates air from the bubbles; and an exhaust unit which discharges the air to the outside in accordance with the pressure of the air in the trap unit. According to the present invention, provided are the trap unit placed in the body of the tank and holding bubbles of recovered chemicals, and a discharge means for discharging the bubbles to the outside in accordance with a water level in the trap unit, so the bubbles can be removed irrespective of an overflow drain pipe, and the size of the device can be minimized unlike an inclination plate method.
申请公布号 KR20160000295(A) 申请公布日期 2016.01.04
申请号 KR20140077496 申请日期 2014.06.24
申请人 K.C.TECH CO., LTD. 发明人 LEE, JUN WOO
分类号 H01L21/02;H01L21/08 主分类号 H01L21/02
代理机构 代理人
主权项
地址