发明名称 PROCEDE ET SYSTEME DE STRUCTURATION SUBMICROMETRIQUE D'UNE SURFACE DE SUBSTRAT
摘要 The subject of the invention is a process for submicron structuring of a surface (6) of a substrate (3) comprising the steps of generating a plasma at atmospheric pressure above said surface (6); and of injecting onto said surface (3), through said plasma, at least one gaseous precursor by means of at least one capillary (5) of submicron diameter. The process may be carried out in a 3D printing system comprising a plate (2) that is mobile in three directions.
申请公布号 FR3011540(B1) 申请公布日期 2016.01.01
申请号 FR20130059713 申请日期 2013.10.07
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE 发明人 BELMONTE THIERRY;AMARAL THIAGO SILVA;GRIES THOMAS;NOEL CEDRIC;CARDOSO RODRIGO PERITO
分类号 B81C1/00;C23C4/12;H01L51/52 主分类号 B81C1/00
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