MEMS Modeling System and Method

摘要

A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.

主权项

1. A method for modeling microelectromechanical devices, the method comprising:
separating a MEMS design into an electrode module, a mass module, and a spring module, wherein the electrode module, the mass module, and the spring module are each structural regions capable of being stored within a two-dimensional mask database, at least one of the electrode module, the mass module, and the spring module being in a separate dummy layer than another one of the electrode module, the mass module, and the spring module; developing a first model for the electrode module, a second model for the mass module, and a third model for the spring module, wherein the first model comprises the following equation:Fe=∈oLH2D2(Vm-Vs)2where Fe is an electrostatic force, εo is a permittivity of free space, L is a length of the electrodes, H is a height of the electrodes, D is a distance between the electrodes, Vm is a main electrode voltage, and Vs is a secondary electrode voltage; and
entering the first model, the second model, and the third model into a MEMS model on a processing system.