| 发明名称 |
LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR |
| 摘要 |
A laser device (100) may include: a laser resonator (20, 30) configured to output pulsed laser light (L); an actuator (35, 36, 37) configured to change wavelength of the pulsed laser light; and a controller (110) configured to receive data of target wavelength for a plurality of pulses of the pulsed laser light before the pulsed laser light is output, and to control the actuator, based on the data of the target wavelength for the plurality of pulses, such that the wavelength of the pulsed laser light approaches the data of the target wavelength. |
| 申请公布号 |
US2015380893(A1) |
申请公布日期 |
2015.12.31 |
| 申请号 |
US201514852120 |
申请日期 |
2015.09.11 |
| 申请人 |
Gigaphoton Inc. |
发明人 |
MATSUNAGA Takashi;KUMAZAKI Takahito;ISHIDA Keisuke;WAKABAYASHI Osamu |
| 分类号 |
H01S3/137;H01S3/104;H01S3/225 |
主分类号 |
H01S3/137 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser device (100), including:
a laser resonator (20, 30) configured to output pulsed laser light (L); an actuator (35, 36, 37) configured to change wavelength of the pulsed laser light; and a controller (110) configured to receive data of target wavelength for a plurality of pulses of the pulsed laser light before the pulsed laser light is output and to control the actuator, based on the data of the target wavelength for the plurality of pulses, such that the wavelength of the pulsed laser light approaches the data of the target wavelength. |
| 地址 |
Tochigi JP |
