| 发明名称 |
MEMS Device and Method for Manufacturing the MEMS Device |
| 摘要 |
A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene. |
| 申请公布号 |
US2015381078(A1) |
申请公布日期 |
2015.12.31 |
| 申请号 |
US201414320466 |
申请日期 |
2014.06.30 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
Massoner Johann |
| 分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a support having a cavity therethrough; and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene. |
| 地址 |
Neubiberg DE |
