发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PROTECTIVE FILM AND ELEMENT HAVING THE SAME
摘要 The present invention relates to a photosensitive resin composition, a protective film and an element having the same. The aforementioned photosensitive resin composition includes a polysiloxane resin (A), an alkali-soluble resin (B), an ortho-naphthoquinone diazide sulfonic acid ester (C) and a solvent (D). The alkali-soluble resin (B) is copolymerized by an unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (b2), a fluorene derivative having a double-bond group (b2) and an unsaturated compound having an acid-decomposable group (b3).
申请公布号 US2015378256(A1) 申请公布日期 2015.12.31
申请号 US201514733969 申请日期 2015.06.09
申请人 CHI MEI CORPORATION 发明人 WU Ming-Ju;SHIH Chun-An
分类号 G03F7/038;G03F7/008 主分类号 G03F7/038
代理机构 代理人
主权项 1. A photosensitive resin composition, comprising: a polysiloxane resin (A), obtained by polycondensing a silane monomer shown as Formula (I): Si(Y1)a(OY2)4-a  (I) in the Formula (I), the Y1 respectively represents a hydrogen atom, an alkyl group of 1 to 10 carbons, an alkene group of 2 to 10 carbons, an aromatic group of 6 to 15 carbons, an alkyl group having an anhydride group, an alkyl group having an epoxy group or an alkoxy group having an epoxy group; the Y2 respectively represents a hydrogen atom, an alkyl group of 1 to 6 carbons, an acetyl group of 1 to 6 carbons or an aromatic group of 6 to 15 carbons; and the a represents an integer of 0 to 3; an alkali-soluble resin (B) copolymerized by an unsaturated carboxylic acid or unsaturated carboxylic anhydride compound (b1), a fluorene derivative having a double-bond group (b2) and an unsaturated compound having an acid-decomposable group (b3); an ortho-naphthoquinone diazide sulfonic acid ester (C); and a solvent (D).
地址 Tainan City TW