HEATED AFM LAYER DEPOSITION AND COOLING PROCESS FOR TMR MAGNETIC RECORDING SENSOR WITH HIGH PINNING FIELD

摘要

Systems and methods are provided for manufacturing a magnetic recording sensor for use in a magnetic reader, such as a tunneling magnetoresistance (TMR) readers. The magnetic recording sensor can be manufactured by heating a substrate in a first chamber and depositing an antiferromagnetic (AFM) layer on the heated substrate. Additionally, a first pinned layer is added onto the AFM layer, and the substrate is subsequently cooled.

主权项

1. A hard disk drive, comprising:
a rotatable disk having a disk surface; a disk drive base; a spindle motor attached to the disk drive base and configured to support the disk for rotating the disk with respect to the disk drive base surface; and a reader created by a process, the process comprising:
heating the substrate in a first chamber;depositing an antiferromagnetic (AFM) layer on the heated substrate;adding a first pinned layer on the AFM layer; andcooling the substrate after adding the first pinned layer.