METHOD FOR TESTING SPECIAL PATTERN AND PROBE CARD DEFECT IN WAFER TESTING

摘要

Methods for testing a special pattern and testing a probe card defect in wafer testing are provided. In the method for testing the special pattern, a wafer is divided into multiple testing partitions, in which each of the testing partitions includes multiple dies. The dies in each testing partition of the wafer are respectively tested by multiple sites of the probe card to obtain a testing map. Then, a number of the dies having defects and a number of the dies without defect within each of the testing partitions in the testing map are accumulated to construct chi-square test and calculate a maximum P-value. Finally, it is determined whether a minimum of the maximum P-values of all of the testing partitions is smaller than a certain predetermined threshold. If the minimum is smaller than the threshold, it is determined that the testing map of the wafer contains the special pattern.

主权项

1. A method for testing a special pattern in wafer testing, adapted for a test machine to determine whether a testing map of a wafer contains a special pattern, the method for testing the special pattern in wafer testing comprising:
dividing the wafer into a plurality of testing partitions, wherein each of the testing partitions comprises a plurality of dies; respectively testing the dies in each testing partition of the wafer by a plurality of sites of the probe card to obtain the testing map of the wafer; accumulating a number of the dies having defects and a number of the dies without defect within each of the testing partitions in the testing map to construct chi-square test and calculate a maximum P-value; determining whether a minimum of the maximum P-values of all of the testing partitions is smaller than a threshold; and determining that the testing map of the wafer contains the special pattern when the minimum is smaller than the threshold.