DETECTOR, PET SYSTEM AND X-RAY CT SYSTEM

摘要

Each semiconductor chip of a detector comprises a semiconductor substrate having a plurality of photodetector units, an insulating layer formed on a front face of the semiconductor substrate, a common electrode arranged on the insulating layer, a readout line for electrically connecting a quenching resistance of each photodetector unit and the common electrode to each other, and a through electrode extending from the common electrode to a rear face of the semiconductor substrate through a through hole of the semiconductor substrate.

主权项

1. A detector comprising:
a wiring board; a plurality of semiconductor chips arranged on the wiring board while being two-dimensionally separated from each other; and first and second bump electrodes arranged between each of the semiconductor chips and the wiring board; wherein each of the semiconductor chips comprises: a semiconductor substrate having a plurality of photodetector units arranged two-dimensionally; an insulating layer formed on a front face of the semiconductor substrate; a common electrode arranged on the insulating layer; a readout line for electrically connecting a quenching resistance of each of the photodetector units and the common electrode to each other; and a through electrode extending from the common electrode to a rear face of the semiconductor substrate through a through hole of the semiconductor substrate; wherein each of the photodetector units comprises: an APD having a first semiconductor region of a first conduction type and a second semiconductor region of a second conduction type for constructing a p-n junction with the first semiconductor region and outputting a carrier; and the quenching resistance electrically connected to the second semiconductor region of the APD; wherein the first bump electrode electrically connects the through electrode and the wiring board to each other; and wherein the second bump electrode electrically connects the first semiconductor region of the APD and the wiring board to each other.