发明名称 ANISOTROPIC DEPOSITION IN NANOSCALE WIRES
摘要 The present invention generally relates to nanoscale wires, including anisotropic deposition in nanoscale wires. In one set of embodiments, material may be deposited on certain portions of a nanoscale wire, e.g., anisotropically. For example, material may be deposited on a first facet of a crystalline nanoscale wire but not on a isotropic second facet. In some cases, additional materials may be deposited thereon, and/or the portions of the nanoscale wire may be removed, e.g., to produce vacant regions within the nanoscale wire, which may contain gas or other species. Other embodiments of the invention may be directed to articles made thereby, devices containing such nanoscale wires, kits involving such nanoscale wires, or the like.
申请公布号 US2015380244(A1) 申请公布日期 2015.12.31
申请号 US201414766285 申请日期 2014.02.04
申请人 PRESIDENT AND FELLOWS OF HARVARD COLLEGE 发明人 LIEBER Charles M.;KIM Sun-Kyung;DAY Robert;PARK Hong-Gyu;KEMPA Thomas J.
分类号 H01L21/02;H01L29/06;C30B29/08;C30B25/04;C30B25/18;C30B29/06;H01L29/16;H01L21/306 主分类号 H01L21/02
代理机构 代理人
主权项 1. A method, comprising: depositing material on a faceted nanoscale wire, wherein the material is deposited preferentially on a first facet relative to a second facet of the nanoscale wire.
地址 Cambridge MA US