发明名称 |
Metal-insulator-semiconductor (MIS) contact with controlled defect density |
摘要 |
Metal-insulator-semiconductor (MIS) contacts for germanium and its alloys include insulator layers of oxygen-deficient metal oxide deposited by atomic layer deposition (ALD). The oxygen deficiency reduces the tunnel barrier resistance of the insulator layer while maintaining the layer's ability to prevent Fermi-level pinning at the metal/semiconductor interface. The oxygen deficiency is controlled by optimizing one or more ALD parameters such as shortened oxidant pulses, use of less-reactive oxidants such as water, heating the substrate during deposition, TMA “cleaning” of native oxide before deposition, and annealing after deposition. Secondary factors include reduced process-chamber pressure, cooled oxidant, and shortened pulses of the metal precursor. |
申请公布号 |
US2015380309(A1) |
申请公布日期 |
2015.12.31 |
申请号 |
US201414315718 |
申请日期 |
2014.06.26 |
申请人 |
Intermolecular Inc. ;GLOBALFOUNDRIES, Inc. |
发明人 |
Mujumdar Salil;Joshi Amol;Kashefi Kevin;Lee Albert Sanghyup;Pethe Abhijit;Yang Bin |
分类号 |
H01L21/768;H01L23/535 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
1. A method of forming a metal-insulator-semiconductor contact, the method comprising:
providing a substrate, wherein the substrate comprises a semiconductor surface; forming a first layer above the semiconductor surface, wherein the first layer comprises an oxygen-deficient metal oxide, and wherein the forming uses an atomic layer deposition process; and forming a second layer above the first layer, wherein the second layer comprises a metal. |
地址 |
San Jose CA US |