| 摘要 |
The present invention relates to a monochromator and a charged particle beam device having the same. More specifically, the present invention relates to a monochromator (MC) for matching an optical axis at low costs and a charged particle beam device having the same. To this end, the monochromator comprises: a first electrostatic lens for receiving charged particle beams discharged from an emitter, refracting a trajectory of the charged particle beams, and consisting of a plurality of electrodes; and a second electrostatic lens having a central axis coaxially disposed with a central axis of the first electrostatic lens, separated apart from the first electrostatic lens at particular intervals, receiving charged particles beams discharged from the first electrostatic lens, refracting a trajectory of the charged particle beams, and consisting of a plurality of electrodes. The charged particle beams pass an off-axis trajectory disposed outside of a central axis of an electrostatic lens as much as a particular offset, and an energy width of charged particle beams may be reduced. Accordingly, even after the charged particle beams pass through a monochromator, a good charged particle beam profile may be obtained. |
