PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

Disclosed is a pressure sensor that outputs a temperature change caused in an electrical resistor according to a pressure of a gas, as a resistance change in the electrical resistor. The pressure sensor includes: a base substrate including a recess formed therein, a floating film formed on the base substrate, a heater formed on a surface of the floating film and configured to heat the floating film when a current flows therein, and a temperature sensor formed as the electrical resistor on the surface of the floating film. The temperature sensor changes a voltage drop with respect to a current flowing therein according to the temperature of the floating film.

主权项

1. A pressure sensor that outputs a temperature change caused in an electrical resistor according to a pressure of a gas, as a resistance change in the electrical resistor, the pressure sensor comprising:
a base substrate including a recess formed therein; a floating film formed on the base substrate to extend across the recess; a heater formed on a surface of the floating film, the heater being configured to heat the floating film when a current flows therein; and a temperature sensor formed as the electrical resistor on the surface of the floating film, the temperature sensor being configured to change a voltage drop with respect to a current flowing therein according to a temperature of the floating film, wherein the current flowing in the temperature sensor is smaller than the current flowing in the heater.