发明名称 |
X-RAY NONDESTRUCTIVE TESTING DEVICE |
摘要 |
There is provided an X-ray nondestructive testing device which irradiates X-rays to an article, the article including a substrate having a predetermined X-ray absorption coefficient and a measurement target object disposed therein and having another X-ray absorption coefficient differing from that of the substrate, the device including: an X-ray source configured to irradiate the X-rays to the article; a detector configured to detect the transmission amounts of the X-rays passed through the article at at least paired different locations; a detection position specifying designator configured to specify the paired different locations as a set of paired locations based on a pre-stored design information; a driving mechanism configured to move the detector to the set of paired locations; and an operation calculator configured to calculate the thickness of the measurement target object based on the transmission amounts of the X-rays detected by the detector. |
申请公布号 |
US2015377801(A1) |
申请公布日期 |
2015.12.31 |
申请号 |
US201514844168 |
申请日期 |
2015.09.03 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SUGIMOTO Naozo;NISHIZAKI Toshihiko;INOUE Masahiro;YASUMA Masuo;NAKAMURA Yu |
分类号 |
G01N23/083 |
主分类号 |
G01N23/083 |
代理机构 |
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代理人 |
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主权项 |
1. An X-ray nondestructive testing device which irradiates X-rays to an article, measures transmission amounts of the X-rays passed through the article and obtains a thickness of a measurement target object based on the transmission amounts, the article being fabricated based on a pre-stored design information and including a substrate having a predetermined X-ray absorption coefficient and the measurement target object disposed within the substrate and having another X-ray absorption coefficient differing from that of the substrate, the device comprising:
an X-ray source configured to irradiate the X-rays to the article; a detector configured to detect the transmission amounts of the X-rays passed through the article at at least paired different locations specified in the article; a detection position specifying designator configured to specify the paired different locations as a set of paired locations based on the pre-stored design information such that a difference between transmission paths of the X-ray at the paired locations specified in the article is defined as the measurement target object; a driving mechanism configured to move the detector to the set of paired locations specified by the detection position specifying designator; and an operation calculator configured to calculate the thickness of the measurement target object based on the transmission amounts of the X-rays detected by the detector. |
地址 |
Tokyo JP |