METHOD AND APPARATUS FOR ENHANCED DETECTION OF DISCONTINUITIES IN THE SURFACE OF A SUBSTRATE

摘要

According to a preferable embodiment of the present invention, a method for an enhanced detection of discontinuities on a surface of a substrate comprises: performing a first review in regards to an existing bad sector in a preset distance or/and a preset angle relative to the bad sector; and then searching an additional peripheral region to determine if a micro-defect exists, performing a second review. Following this, connect the first bad sector and the second bad sector, and perform a complement procedure.