PATTERNING OF OLED MATERIALS

摘要

A method of making a patterned OLED layer or layers. The method uses a shadow mask having, for example, a free-standing silicon nitride membrane to pattern color emitter material with a feature size of less than 10 microns. The methods can be used, for example, in the manufacture of OLED microdisplays.

主权项

1. A method comprising:
providing a shadow mask having a free-standing silicon nitride membrane, silicon oxide membrane, or aluminum oxide membrane; forming a pattern of a first color emitter material on a substrate using the shadow mask, wherein the pattern of the first color emitter material has one or more first color emitter material structures; forming a pattern of a second color emitter material on the substrate having the pattern of the first color emitter material using a second shadow mask having a free-standing silicon nitride membrane, silicon oxide membrane, or aluminum oxide membrane, wherein the pattern of the second color emitter material has one or more second color emitter material structures; and forming a pattern of a third color emitter material on the substrate having the pattern of the first color emitter material and the pattern of the second color emitter material using a third shadow mask having a free-standing silicon nitride membrane, silicon oxide membrane, or aluminum oxide membrane, wherein the pattern of third color emitter material has one or more third color emitter material structures.