发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a semiconductor substrate including a plurality of active areas, a bit line crossing the plurality of active areas, a direct contact connecting a first active area of the plurality of active areas with the bit line, an insulating spacer covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate, a contact pad connected with a side wall of a second active area of the plurality of active areas, which neighbors the first active area, a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad, and a buried contact connected with the contact pad and filling the contact hole.
申请公布号 US2015380508(A1) 申请公布日期 2015.12.31
申请号 US201514697782 申请日期 2015.04.28
申请人 Samsung Electronics Co., Ltd. 发明人 KIM Dae-ik;KIM Hyoung-sub;KIM Sung-eui
分类号 H01L29/45;H01L23/528 主分类号 H01L29/45
代理机构 代理人
主权项 1. A semiconductor device comprising: a semiconductor substrate having a plurality of active areas; a bit line crossing the plurality of active areas; a direct contact connecting a first active area of the plurality of active areas with the bit line; an insulating spacer substantially covering a side wall of the bit line and extending at a level lower than a level of an upper surface of the semiconductor substrate; a contact pad connected with a side wall of a second active area of the plurality of active areas, the contact pad being next to the first active area; a first insulating pattern defining a contact hole exposing the insulating spacer and the contact pad; and a buried contact connected to the contact pad and filling the contact hole.
地址 Suwon-si KR