X-ray apparatus with deflectable electron beam

摘要

An x-ray apparatus (1), has an electron beam source (2), a target (4), onto which the electron beam (3) is directed to form a focal spot (5; 5a, 5b) on the target (4), x-ray optics (6) for collecting x-rays emitted from the focal spot (5; 5a, 5b) to form an x-ray beam (8) and a sample position (9) at which the x-ray beam (8) is directed. The x-ray apparatus (1) further includes an electrostatic or electromagnetic electron beam deflection device (10) suitable for moving the focal spot (5; 5a, 5b) on the target (4). The extension of the focal spot (5; 5a, 5b) in any direction (x, y, z) is at least a factor of 1.5 smaller than the extension of the target (4). An x-ray apparatus is thereby provided with simplified alignment of the x-ray optics with respect to a microfocus x-ray source.

主权项

1. An x-ray apparatus comprising:
an electron beam source, emitting an electron beam; a target onto which the electron beam is directed, the electron beam thereby forming a focal spot on the target; x-ray optics structured to collect x-rays emitted from the focal spot, thereby forming an x-ray beam; a sample position to which the x-ray beam is directed; an electrostatic or electromagnetic electron beam deflection device, the deflection device being disposed, structured and dimensioned to move the focal spot on the target in any direction, wherein the focal spot has a size which is smaller at least by a factor F=1.5 than a size of the target; and a switching element, said switching element being disposed, structured and dimensioned to switch the apparatus between two operation modes, wherein, in a first operation mode, a photon flux is maximized and in a second operation mode, a photon flux density is maximized.