X-RAY DETECTION BOARD AND MANUFACTURE METHOD THEREOF, AND X-RAY DETECTION DEVICE

摘要

An X-ray detection board and a manufacture method thereof, and an X-ray detection device are disclosed in the embodiments of the present invention. The X-ray detection board comprises: a substrate; photoelectric conversion devices disposed on the substrate; a conversion layer disposed on the photoelectric conversion devices and configured to convert X-rays into visible light; and a packaging layer disposed on the conversion layer and having a plurality of transmission windows, wherein the photoelectric conversion devices correspond in position to the transmission windows, respectively, and wherein condenser lenses for condensing the light converted by the conversion layer are disposed on sides of the photoelectric conversion devices facing the transmission windows. A light condensing effect is improved by use of the condenser lenses such as microlenses so that more light can be projected upon the photoelectric conversion devices through the condenser lenses. As a result, a quantum efficiency and thus an imaging effect are improved.

主权项

1. An X-ray detection board, comprising:
a substrate; photoelectric conversion devices disposed on the substrate; a conversion layer disposed over the photoelectric conversion devices and configured to convert X-rays into visible light; and a packaging layer disposed on the conversion layer and having a plurality of transmission windows, wherein the photoelectric conversion devices correspond in position to the transmission windows, respectively, and wherein condenser lenses for condensing the light converted by the conversion layer are disposed on sides of the photoelectric conversion devices facing the transmission windows.