PRESSURE MEASURING DEVICE AND PRESSURE MEASURING METHOD

摘要

Provided is a pressure measuring device including a first electric resistor that is exposed to gas; a second electric resistor that is exposed to gas and has the same structure as that of the first electric resistor; a first measuring unit that measures a first voltage drop generated across the first electric resistor; a second measuring unit that measures a second voltage drop generated across the second electric resistor; a third measuring unit that measures a third voltage drop generated across the first electric resistor; a calculating unit that calculates a correction value that corrects the third voltage drop, based on a difference between the first voltage drop and the second voltage drop; and an output unit that corrects the third voltage drop using the calculated correction value and outputs a pressure value according to the third voltage value after the correction.

主权项

1. A pressure measuring device comprising:
a first electric resistor adapted to be exposed to a gas; a second electric resistor adapted to be exposed to the gas and having the same structure as that of the first electric resistor; a first measuring unit configured to input a current of a first current value to the first electric resistor and measure a first voltage drop generated across the first electric resistor according to the current of the first current value; a second measuring unit configured to input the current of the first current value to the second electric resistor and measure a second voltage drop generated across the second electric resistor according to the current of the first current value; a third measuring unit configured to input a current of a second current value greater than the first current value to the first electric resistor to generate heat from the first electric resistor and measure a third voltage drop generated across the first electric resistor according to the current of the second current value; a calculating unit configured to calculate a correction value that corrects the third voltage drop, based on a difference between the first voltage drop and the second voltage drop; and an output unit configured to correct the third voltage drop using the calculated correction value and output a pressure value according to the third voltage value after the correction.