发明名称 |
STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES |
摘要 |
An apparatus includes a lens material forming a lens. The apparatus also includes a piezoelectric capacitor over the lens material, where the piezoelectric capacitor is configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens. The apparatus further includes at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor. The at least one stress compensation ring is configured to at least partially reduce bending of the lens material caused by stress on or in the lens material. |
申请公布号 |
US2015378127(A1) |
申请公布日期 |
2015.12.31 |
申请号 |
US201414533947 |
申请日期 |
2014.11.05 |
申请人 |
Texas Instruments Incorporated |
发明人 |
Chang YungShan;Jackson Ricky A.;Ritchison Jeff W.;Jiang Neng |
分类号 |
G02B7/04;G02B7/09;B81C1/00;B81B7/02 |
主分类号 |
G02B7/04 |
代理机构 |
|
代理人 |
|
主权项 |
1. An apparatus comprising:
a lens material forming a lens; a piezoelectric capacitor over the lens material, the piezoelectric capacitor configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens; and at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor, the at least one stress compensation ring configured to at least partially reduce bending of the lens material caused by stress on or in the lens material. |
地址 |
Dallas TX US |