SUBSTRATE TRANSFERRING ARM AND SUBSTRATE TRANSFERRING APPARATUS INCLUDING THE SAME

摘要

A substrate transporting arm and a substrate transporting apparatus including the same prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transporting arm includes a body and a plurality of substrate supporters coupled to the body. Each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion

主权项

1. A substrate transporting arm comprising:
a body; and a plurality of substrate supporters coupled to the body, wherein: each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion.