| 摘要 |
<p>An X-ray generation device 1 is provided with an electron gun unit 3 for emitting an electron beam EB, and a target unit T having a substrate 21 comprised of diamond, and a target body 23 comprised of a material for generating X-rays XR with incidence of the electron beam EB thereto and buried in close contact in the substrate 21. An outer diameter of the target body 23 is in the range of 0.05 to 1 µm. An outer diameter of an irradiation field of the electron beam EB on the target unit T is in the range of 1.1 to 2.5 times the outer diameter of the target body 23. The X-ray generation device 1 irradiates the target body 23 with the electron beam EB so that the target body 23 is included in the irradiation field, thereby to generate X-rays XR from the target body 23.</p> |
