发明名称 |
Evaluation of surface and subsurface characteristics of a sample |
摘要 |
A method and apparatus is disclosed for evaluating surface and subsurface features in a sample by detecting scattering of a probe beam. More particularly, the subject invention relates to the detection of thermal and/or plasma waves through the phenomenon of optical scattering. The apparatus includes a periodic excitation source for supplying energy to the surface of the sample to generate thermal and/or plasma waves. A radiation probe is directed to the surface of the sample within the area that is being periodically excited and in a manner that the probe beam is scattered from the excited area. Variations of the intensity of the scattered probe beam are detected and processed to evaluate surface and subsurface characteristics of the sample.
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申请公布号 |
US4632561(A) |
申请公布日期 |
1986.12.30 |
申请号 |
US19850728759 |
申请日期 |
1985.04.30 |
申请人 |
THERMA-WAVE, INC. |
发明人 |
ROSENCWAIG, ALLAN;OPSAL, JON |
分类号 |
G01N23/225;G01N21/47;G01N21/84;G01N21/88;G01N25/72;(IPC1-7):G01N21/47 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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